VACUUM CONTROLLER » Modular »
MM200:
- Full Measurement Range Vacuum Instruments
(7,600 to 1 x 10-11 Torr) - Expandable Design – System may be assembled by combining modules to form the desired multi-functional instruments, up to 10 channels
- Exceptional Readability – Large, bright LEDs
- Selectable Units – Torr, microns, psi, mBar,
or Pascal - System Leakup Rate – Digitally displayed in
microns per hour - Computer Interface – RS232/RS485 digital communications with host computer
- 0 - 10V, mV outputs for each sensor
- Easy to Use – All controls accessible through
front panel - Gas Compensation – Argon, Nitrogen
- CE Certified and Qualified to UL61010-1
This dual display, half-rack, microprocessor-based Modular Vacuum Gauge replaces the numerous instruments previously required for different functions and ranges. Configurations include various combinations of ionization, thermocouple, convection, diaphragm, capacitance manometer, and set point relay modules. The assignments of up to 8 set point relays controlled from the front panel are individually programmable. The ionization gauge can be turned on manually or automatically. The MM200 Modular Gauge is the most flexible solution to vacuum measurement & control.
MM200 Accessory Modules
| QUAD RELAY | QUAD RELAY MODULE | N/A | 2-6200-211 |
|---|---|---|---|
| RS232 / 485 | RS232/485 COMMUNICATIONS MODULE | N/A | 2-6200-213 |
| 2A | DUAL THERMOCOUPLE MODULE | 1 - 20,000 mTorr (microns) | 2-6200-186 |
| 4A | DUAL CONVECTION MODULE | 1 mTorr - 1000 Torr | 2-6200-215 |
| 7B | COLD CATHODE MODULE | 10-3 - 10-7 Torr | 2-6200-227 |
| 7E | COLD CATHODE MODULE | 10-2 - 10-8 Torr | 2-6200-223 |
| 7F | COLD CATHODE MODULE | 10-2 - 10-11 Torr | 2-6200-245 |
| 7FCS | COLD CATHODE MODULE - QUICK START | 10-2 - 10-11 Torr | 2-6200-285 |
| 1E | DUAL PIEZO DIAPHRAGM MODULE | 1 - 1000 Torr | 2-6200-220 |
| 1F | DUAL PIEZO DIAPHRAGM MODULE | 1 - 7600 Torr | 2-6200-244 |
| CDG | CAPACITANCE DIAPHRAGM MODULE | 0.1 - 1000 Torr (selectable) | 2-6200-252 |
| 3D MINI BA | MINI BA HOT CATHODE MODULE | 10-2 - 2 x 10-10 Torr | 2-6200-291 |
| 3D | HOT FILAMENT BA MODULE - GLASS | 10-2 - 10-8 Torr | 2-6200-226 |
| 3E | HOT FILAMENT MODULE - NUDE | 10-3 - 10-11 Torr | 2-6200-232 |